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Design, characterization, and packaging for MEMS and microelectronics II [electronic resource] : 17-19 December, 2001, Adelaide, Australia / Paul D. Frnazon, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cosponsored by U.S. Air Force Office of Scientific Research, Asian Office of Aerospace Research and Development [and others] ; cooperating organization IEEE South Australia Section

Published
Bellingham, Wash. : SPIE, [2001]
Copyright Date
©2001
Physical Description
ix, 322 pages : illustrations ; 28 cm.
Additional Creators
Franzon, Paul D., Society of Photo-optical Instrumentation Engineers, United States. Air Force. Asian Office of Aerospace Research and Development, Institute of Electrical and Electronics Engineers. South Australia Section, and SPIE Digital Library
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AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
Bibliography Note
Includes bibliographical references and author index.
Other Forms
Also available in print.
Reproduction Note
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
View MARC record | catkey: 4576273