Optical metrology roadmap for the semiconductor, optical, and data storage industries II [electronic resource] : 2-3 August, 2001, San Diego, [California] USA / Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

Published: Bellingham, Wash. : SPIE, [2001]
Copyright Date: ©2001
Physical Description: ix, 294 pages : illustrations ; 28 cm.
Additional Creators: Duparré, Angela, Singh, Bhanwar, Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library

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Proceedings of SPIE--the International Society for Optical Engineering ; v. 4449

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Includes bibliographical references and author index.

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Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.

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Optical metrology roadmap for the semiconductor, optical, and data storage industries II [electronic resource] : 2-3 August, 2001, San Diego, [California] USA / Angela Duparré, Bhanwar Singh, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

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