MEMS components and applications for industry, automobiles, aerospace, and communication [electronic resource] : 22-23 October 2001, San Francisco, USA / Henry Helvajian, Siegfried W. Janson, Franz Lärmer, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by DARPA--Defense Advanced Research Projects Agency (USA) ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) [and others].