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Metrology-based control for micro-manufacturing [electronic resource] : 24-25 January 2001, San Jose [Calif.], USA / Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering

Published:
Bellingham, Wash. : SPIE, [2001]
Copyright Date:
©2001
Physical Description:
vii, 156 pages : illustrations ; 28 cm.
Additional Creators:
Tobin, Kenneth W., Lakhani, Fred, Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library
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AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
Bibliography Note:
Includes bibliographical references and index.
Other Forms:
Also available in print.
Reproduction Note:
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
View MARC record | catkey: 4576475