Metrology-based control for micro-manufacturing [electronic resource] : 24-25 January 2001, San Jose [Calif.], USA / Kenneth W. Tobin, Fred Lakhani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering
- Bellingham, Wash. : SPIE, 
- Copyright Date:
- Physical Description:
- vii, 156 pages : illustrations ; 28 cm.
- Additional Creators:
- Tobin, Kenneth W., Lakhani, Fred, Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and index.
- Other Forms:
- Also available in print.
- Reproduction Note:
- Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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