MOEMS and miniaturized systems II [electronic resource] : 22-24 October, 2001, San Francisco, USA / M. Edward Motamedi, Rolf Göring, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International (USA) [and others].
- Published
- Bellingham, Wash., USA : SPIE, [2001]
- Copyright Date
- ©2001
- Physical Description
- xxv, 350 pages : illustrations ; 28 cm.
- Additional Creators
- Motamedi, M. Edward, Göring, Rolf, Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, and SPIE Digital Library
Access Online
- Series
- Subject(s)
- Note
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note
- Includes bibliographical references and author index.
- Other Forms
- Also available in print.
- Reproduction Note
- Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2003. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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