Metal/nonmetal microsystems [electronic resource] : physics, technology, and applications, 11-14 September 1995, Polanica Zdrój, Poland / Benedykt W. Licznerski, Andrzej Dziedzic, Editors ; organized by Institute of Electronic Technology, Technical University of Wrocław, Wrocław Chapter of Polish Academy of Sciences ; Sponsored by State Committee for Scientific Research [and others] ; Published by SPIE--The International Society for Optical Engineering
- Additional Titles:
- EPMS '95
- Published:
- Bellingham, Wash. : SPIE, [1996]
- Copyright Date:
- ©1996
- Physical Description:
- xxii, 422 pages : illustrations ; 28 cm.
- Additional Creators:
- Licznerski, Benedykt W., Dziedzic, Andrzej, Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library
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- Note:
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and indexes.
- Other Forms:
- Also issued in print.
- Reproduction Note:
- Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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