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Imaging and illumination for metrology and inspection [electronic resource] : 2-4 November 1994, Boston, Massachusetts / Donald J. Svetkoff, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
Bellingham, Wash. : SPIE, 
vii, 276 pages : illustrations ; 28 cm.
Svetkoff, Donald J.
Society of Photo-optical Instrumentation Engineers
SPIE Digital Library
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Proceedings of SPIE--the International Society for Optical Engineering ; v. 2348
AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
Includes bibliographical references and author index.
Also issued in print.
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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