Imaging and illumination for metrology and inspection [electronic resource] : 2-4 November 1994, Boston, Massachusetts / Donald J. Svetkoff, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering
Includes bibliographical references and author index.
Other Forms:
Also issued in print.
Reproduction Note:
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.