Optical characterization techniques for high-performance microelectronic device manufacturing II [electronic resource] : 25-26 October 1995, Austin, Texas / John K. Lowell, Ray T. Chen, Jagdish P. Mathur, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Bellingham, Wash. : SPIE, 
- Copyright Date:
- Physical Description:
- ix, 302 pages : illustrations ; 28 cm.
- Additional Creators:
- Lowell, John, Chen, Ray T., Mathur, Jagdish P., Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library
- Proceedings / SPIE--the International Society for Optical Engineering, 0277-786X ; v. 2638
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and index.
- Other Forms:
- Also issued in print.
- Reproduction Note:
- Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
View MARC record | catkey: 4577792