Micromachining and microfabrication process technology [electronic resource] : 23-24 October, 1995, Austin, Texas / Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society of Optical Engineering

Published: Bellingham, Wash. : SPIE, [1995]
Copyright Date: ©1995
Physical Description: vii, 336 pages : illustrations ; 28 cm.
Additional Creators: Markus, Karen W., Semiconductor Equipment and Materials International, National Institute of Standards and Technology (U.S.), Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library

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Proceedings of SPIE--the International Society for Optical Engineering ; v. 2639

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Includes bibliographical references and index.

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Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.

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