Microelectronic device and multilevel interconnection technology [electronic resource] : 25-26 October 1995, Austin, Texas / Ih-Chin Chen [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.