Process, equipment, and materials control in integrated circuit manufacturing [electronic resource] : 25-26 October 1995, Austin, Texas / Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International
- Bellingham, Wash. : SPIE, 
- Copyright Date:
- Physical Description:
- vii, 238 pages : illustrations ; 28 cm.
- Additional Creators:
- Sabnis, Anant G., Raaijmakers, Ivo J., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, and SPIE Digital Library
- Proceedings / SPIE--the International Society for Optical Engineering, 0277-786X ; v. 2637
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and author index.
- Other Forms:
- Also issued in print.
- Reproduction Note:
- Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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