Microelectronics technology and process integration [electronic resource] : 20-21 October 1994, Austin, Texas / Fusen E. Chen, Shyam P. Murarka, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering
- Bellingham, Wash., USA : SPIE, 
- Copyright Date:
- Physical Description:
- ix, 290 pages : illustrations ; 28 cm.
- Additional Creators:
- Chen, Fusen E., Murarka, S. P., Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library
- Proceedings / SPIE--the International Society for Optical Engineering, 0277-786X ; v. 2335
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and author index.
- Other Forms:
- Also issued in print.
- Reproduction Note:
- Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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