Microelectronic device technology [electronic resource] : 1-2 October 1997, Austin, Texas / Mark Rodder [and others], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society

Published:: Bellingham, Wash., USA : SPIE, [1997]
Copyright Date:: ©1997
Physical Description:: ix, 398 pages : illustrations ; 28 cm.
Additional Creators:: Rodder, Mark, Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library

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SPIE proceedings series, 0277-786X ; v. 3212

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Includes bibliographical references and index.

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Also issued in print.

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Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.

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