Microelectronic device technology [electronic resource] : 1-2 October 1997, Austin, Texas / Mark Rodder [and others], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, Solid State Technology, [and] The Electrochemical Society
- Bellingham, Wash., USA : SPIE, 
- Copyright Date:
- Physical Description:
- ix, 398 pages : illustrations ; 28 cm.
- Additional Creators:
- Rodder, Mark, Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and index.
- Other Forms:
- Also issued in print.
- Reproduction Note:
- Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
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