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Optical/laser microlithography VII [electronic resource] : 2-4 March 1994, San Jose, California / Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International

Additional Titles
Optical laser microlithography VII, Optical/laser microlithography 7, and Optical/laser microlithography seven
Published
Bellingham, Wash., USA : SPIE, [1994]
Copyright Date
©1994
Physical Description
xiii, 1,008 pages : illustrations ; 28 cm.
Additional Creators
Brunner, Timothy A., Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, and SPIE Digital Library
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AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
Bibliography Note
Includes bibliographical references and author index.
Other Forms
Also issued in print.
Reproduction Note
Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2004. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.
View MARC record | catkey: 4579030