16th Annual Symposium on Photomask Technology and Management [electronic resource] : proceedings, 18-20 September 1996, Redwood City, California / Gilbert V. Shelden, James A. Reynolds., chairs/editors ; sponsored by BACUS

Conference Author: Symposium on Photomask Technology and Management (16th : 1996 : Redwood City, Calif.)
Additional Titles: Photomask technology and management
Published: Bellingham, Wash. : SPIE, [1996]
Copyright Date: ©1996
Physical Description: x, 586 pages : illustrations ; 28 cm.
Additional Creators: Shelden, Gilbert V., Reynolds, James A., 1930-, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, and SPIE Digital Library

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Proceedings of SPIE--the International Society for Optical Engineering ; v. 2884

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AVAILABLE ONLINE TO AUTHORIZED PSU USERS.

Bibliography Note

Includes bibliographical references and index.

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Also issued in print.

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Electronic reproduction. Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 2005. Mode of access: World Wide Web. Access restricted to SPIE Digital Library subscribers.

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