MEMS, MOEMS, and micromachining II [electronic resource] : 3-4 April, 2006, Strasbourg, France / Hakan Ürey, Ayman El-Fatatry, chairs/editors ; sponsored by SPIE Europe ; cosponsored by Conseil general du Bas-Rhin (France) [and others] ; cooperating organizations CNOP--Comité national d'optique et de photonique (France) [and others] ; published by SPIE--the International Society for Optical Engineering