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FABRICATION OF SILICON MICROCIRCUITS BY NEUTRON TRANSMUTATION DOPING. Final Report
Author
Klahr, C. N.
Published
United States : [publisher not identified], 1968.
[Oak Ridge, Tennessee] : [U.S. Atomic Energy Commission], 1968.
Physical Description
microfiche : negative ; 11 x 15 cm
Additional Creators
Cohen, M. S.
Full Text available online
Availability
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Report Numbers
NYO-3124-3
Other Subject(s)
Carriers
Circuits/fabrication of silicon micro-, by neutron transmutation doping
Crystal doping
Crystals
Electronics
Fabrication
Impurities
Integrated circuits
Microelectronics
N26400 -instrumentation-miscellaneous instruments & components
N33100 -physics (solid state).
Neutron beams
Nuclear reactions
Semiconductors
Silicon
Silicon/fabrication of microcircuits of, by neutron transmutation doping
Transmutations
Collection
U.S. Atomic Energy Commission depository collection.
Note
DOE contract number: AT(30-1)-3124
NSA number: NSA-24-023039
OSTI Identifier 4172467
Research organization: Fundamental Methods Associates, New York.
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