The high temperature failure of ceramics has been observed to occur by the nucleation, growth and coalescence of cracks. Each process involves diffusive cavity nucleation and growth, either within a damage zone or at microstructural heterogeneities. The specific cavitation and cracking mechanisms pertinent to ceramics are described and available models are presented. Particular emphasis is placed on continuous crack nucleation at microstructural heterogeneities and the crack coalescence process that causes eventual failure. Failure time data are also reviewed and correlated with models.