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EUV lithography / Vivek Bakshi, editor

Published
Bellingham, Wash. : SPIE Press ; Hoboken, NJ : John Wiley, [2009]
Copyright Date
©2009
Physical Description
xxvii, 673 pages : illustrations ; 27 cm
Additional Creators
Bakshi, Vivek

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Subject(s)
ISBN
9780819469649 (SPIE)
0819469645 (SPIE)
9780470471555 (Wiley)
0470471557 (Wiley)
Bibliography Note
Includes bibliographical references and index.
View MARC record | catkey: 5123010