LIGA and its applications [electronic resource] / edited by Volker Saile [and others].
- Advanced micro & nanosystems ; 7
- 9783527622573 and 3527622578
- AVAILABLE ONLINE TO AUTHORIZED PSU USERS.
- Bibliography Note:
- Includes bibliographical references and index.
- Reproduction Note:
- Electronic reproduction. Hoboken, N.J. : Wiley InterScience, 2009. Mode of access: World Wide Web. System requirements: Web browser. Title from title screen (viewed on Sep. 21, 2009). Access may be restricted to users at subscribing institutions.
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