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Microelectronic test patterns : an overview / Martin G. Buehler

Author:
Buehler, Martin G.
Published:
[Washington] : National Bureau of Standards, 1974. and [Washington] : [for sale by the Supt. of Docs., U.S. Govt. Print. Off]
Physical Description:
19 pages : illustrations ; 26 cm.
Additional Creators:
United States. Defense Advanced Research Projects Agency, United States. Defense Nuclear Agency, and United States. National Bureau of Standards
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Series:
Semiconductor measurement technology and NBS special publication ; 400-6
Subject(s):
Note:
"Jointly sponsored by the Defense Advanced Research Projects Agency, the Defense Nuclear Agency, and the National Bureau of Standards."
Bibliography Note:
Bibliography: page 11.
View MARC record | catkey: 7515882