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ARPA/NBS workshop IV : surface analysis for silicon devices / [edited by] A. George Lieberman

Published
Washington : U.S. Dept. of Commerce, National Bureau of Standards, 1976.
Washington : [For sale by the Supt. of Docs., Govt. Print. Off]
Physical Description
vii, 239 pages : illustrations ; 27 cm.
Additional Creators
Lieberman, A. George (Alfred George), 1937- and United States. National Bureau of Standards

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Series
Report Numbers
C 13.10:400-23.
Subject(s)
Note
"Contains the proceedings of the ARPA/NBS workshop IV, Surface analysis for silicon devices, held at the National Bureau of Standards on April 23-24, 1975."
"Issued March 1976."
Bibliography Note
Includes bibliographical references and index.
View MARC record | catkey: 7515899