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Silicon, chemical etching / editor, J. Grabmaier ; with contributions by R.B. Heimann [and others].
Published:
Berlin ; New York : Springer-Verlag, 1982.
Physical Description:
226 pages : illustrations ; 25 cm.
Additional Creators:
Grabmaier, J.
and
Heimann, R. B. (Robert Bertram), 1938-
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Series:
Crystals--growth, properties, and applications ; 8.
Subject(s):
Silicon
Crystals
—
Etching
ISBN:
0387118624 (U.S.)
Bibliography Note:
Includes bibliographical references and index.
View MARC record
| catkey: 780847