Materials for microlithography [electronic resource] : radiation-sensitive polymers / L.F. Thompson, editor, C.G. Willson, editor, J.M.J. Fréchet, editor ; based on a symposium cosponsored by the Division of Polymeric Materials, Science and Engineering and the Division of Polymer Chemistry, at the 187th Meeting of the American Chemical Society, St. Louis, Missouri, April 8-13, 1984
- Washington, D.C. : The Society, 1984.
- Physical Description:
- viii, 494 pages : illustrations ; 24 cm.
- Additional Creators:
- Thompson, L. F., 1944-
Willson, C. G. (C. Grant), 1939-
Fréchet, Jean M. J.
American Chemical Society. Division of Polymeric Materials: Science and Engineering
American Chemical Society. Division of Polymer Chemistry
American Chemical Society. Meeting (187th : 1984 : St. Louis, Mo.)
- ACS symposium series, 0097-6156 ; 266
- Restrictions on Access:
- License restrictions may limit access.
- Related Titles:
- Radiation-sensitive polymers
- Bibliography Note:
- Includes bibliographies and indexes.
View MARC record | catkey: 8044917