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Plasma processing for VLSI / edited by Norman G. Einspruch, Dale M. Brown
Published
New York : Academic Press, 1984.
Physical Description
xiv, 527 p. : ill. ; 24 cm.
Additional Creators
Einspruch, Norman G.
and
Brown, Dale M.
Full Text available online
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Series
VLSI electronics ; v. 8
Subject(s)
Integrated circuits
—
Very large scale integration
Plasma (Ionized gases)
—
Industrial applications
ISBN
0122341082 (alk. paper)
Bibliography Note
Includes bibliographies and index.
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| catkey: 931578