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Ion implantation : science and technology / edited by J.F. Ziegler

Published: Orlando : Academic Press, 1984.
Physical Description: xi, 635 p. : ill. ; 24 cm.
Additional Creators: Ziegler, J. F. (James F.)

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Subject(s)

Ion implantation

ISBN

0127806202 (alk. paper)

Bibliography Note

Includes bibliographies and index.

View MARC record | catkey: 960691